Glossary:MEMS
MEMS or MicroElectroMechanical Systems are devices containing microscopic moving parts and fabricated using the techniques developed by the miceoelectronics industry for manufacturing integrated circuits. They find many common applications, including the accelerometers and microphones in smartphones, pressure sensors, the print head in some inkjet printers and the Digtal Micromirror Device which creates the image in some data projectors.